Data of research equipment

Equipment code: P17-060

Mask Aligner – Description of equipment

  • Under contract: 1000-18-0510
  • Registration number: ARRS-RI-ROPR-JR-Login/2018/60
  • Classification of criteria: 47-Micro and nano-technology systems
  • Process Equipment-physical/lithography/Optical
Date of acquisition of equipment
Date of Assembly on site14.10.2018
Date of start of operation of equipment on site16.10.2018
Inventory equipment number35344 the

The equipment is located in the clean room in the Laboratory for Microelectronics. Access to equipment is possible under the agreement and prior announcement.

The price of the operator is 72 €/h + operating costs (gas, electricity, etc.) based on actual consumption for project.