Data of research equipment
| Equipment code: P17-060 |
Mask Aligner – Description of equipment
- Under contract: 1000-18-0510
- Registration number: ARRS-RI-ROPR-JR-Login/2018/60
- Classification of criteria: 47-Micro and nano-technology systems
- Process Equipment-physical/lithography/Optical
| Date of acquisition of equipment | 8.10.2018 |
| Date of Assembly on site | 14.10.2018 |
| Date of start of operation of equipment on site | 16.10.2018 |
| Inventory equipment number | 35344 the |
The equipment is located in the clean room in the Laboratory for Microelectronics. Access to equipment is possible under the agreement and prior announcement.
The price of the operator is 72 €/h + operating costs (gas, electricity, etc.) based on actual consumption for project.